Hard X-ray Nanoprobe with Spherical-aberration-corrected Quad-spherical-mirror Optics
نویسندگان
چکیده
منابع مشابه
Hitachi’s Spherical Aberration Corrected STEM: HD-2700
INTRODUCTION AS VLSI (very large scale integration) technology evolves toward ever smaller features and multilayer designs, analysis and control of structures and compositions at the atomic level is becoming increasingly important. In 1998 Hitachi HighTechnologies Corporation released the HD-2000, a STEM (scanning transmission electron microscope) that was very well received for combining the e...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2013
ISSN: 1742-6596
DOI: 10.1088/1742-6596/463/1/012019